What Is a Lithography Lens?
A lithography lens is a high-precision optical system used in photolithography machines — critical tools in semiconductor and microfabrication industries. These lenses are designed to project and reduce photomasks onto silicon wafers with nanometer accuracy, enabling the production of integrated circuits, MEMS, and nanostructures.
A lithography lens typically consists of a complex multi-element assembly, often including aspherical lenses, diffractive optical elements, and high-refractive index materials, all precisely aligned to minimize optical aberrations and achieve diffraction-limited resolution.
Lithography Lens Manufacturing: Challenges and Techniques
The fabrication of lithography lenses involves extremely tight tolerances in design, machining, and assembly. Key manufacturing processes include:
- Ultra-precision grinding and polishing of optical surfaces
- Aspheric surface generation and testing
- Sub-micron CNC centering and edge trimming
- Surface coating (AR/HR coatings, phase shift films)
- Cleanroom-level assembly and alignment
- Interferometric testing and wavefront correction
The assembly of lithography lenses requires active alignment and bonding under cleanroom conditions, often using laser-based interferometry and six-degree-of-freedom positioning systems to achieve the required alignment accuracy.
Why CNC Centering Is Critical for Lithography Lenses
- Nanometer-scale accuracy: Lithography lenses work with feature sizes often <10 nm. Any misalignment can drastically degrade image quality.
- Multi-element system alignment: Each element must be perfectly aligned for system-level performance.
- Thermal and mechanical stability: Proper centering reduces stress and ensures long-term operational reliability.
Advantages of Using a High-Precision CNC Centering Lathe
| Feature | Benefit |
| Sub-micron resolution (0.1 µm) | Achieves extreme centering accuracy |
| Full automation | Repeatability, low human error |
| Dual-axis detection | Precision OD grinding and alignment |
| Custom profiles supported | Can machine lenses for non-standard mounts |
| Clean integration into workflow | Ready for cleanroom assembly or bonding |
What Is CNC Centering?
In high-precision optics, centering refers to aligning the optical axis of a lens (defined by the curvature of its surfaces) with its mechanical axis (usually the outer diameter or mounting surface). Even small decenter errors — especially in high-NA lithography lenses — can cause significant aberrations.
A CNC centering lathe is a highly specialized machine used to:
- Hold the lens by its optical axis
- Precisely trim and grind the lens outer diameter (OD)
- Cut bevels or steps for mounting
- Ensure concentricity and balance of the lens element
At our facility, we operate a HyperPrecision CNC Centering Lathe capable of 0.1 µm resolution and fully automated OD machining. This enables us to:
- Manufacture lenses for DUV and EUV lithography tools
- Precisely align and mount aspheric and multi-element systems
- Support R&D and production for semiconductor and nano-fabrication industries
Applications of Lithography Lenses
Lithography lenses are at the core of many critical technologies, including:
- Semiconductor fabrication (e.g., ICs, transistors, logic chips)
- Flat panel displays
- Photonic devices
- MEMS and NEMS production
- Nanoimprint lithography
- UV and EUV lithography systems
Different generations of photolithography tools use varying wavelengths, from i-line (365 nm) to DUV (248/193 nm) and EUV (13.5 nm), each requiring tailored lens materials and coating solutions.Our Capabilities
New Equipment: HyperPrecision Ultra-CNC Centering System
To meet the demanding tolerances of today’s optical systems, we recently invested in the HyperPrecision Ultra-CNC Automatic Centering Lathe, capable of:
- 0.1 µm resolution accuracy
- 1µm processing accuracy
- Full automation for repeatability
- Precision edge grinding and centering
We specialize in the custom design, ultra-precision manufacturing, and assembly of lithography-grade lenses and optical modules. Our services include:
- Optical design and simulation (Zemax/Solid Works/Code V etc.)
- Fabrication of spherical and aspheric lenses
- High-tolerance CNC centering and polishing
- Integrated opto-mechanical-electrical systems
- Opto-mechanical system design
- Full-system alignment and testing
Why Work With Us?
- Experience: Proven track record in optical systems and photolithography components
- Precision: Sub-micron alignment and QC standards
- Customization: Tailor-made optical solutions for advanced applications
- Integration: Full support from optics to mechanics to electronics
- Investment: Continuously upgrading with cutting-edge equipment
Interested in Lithography Lens Manufacturing?
If you’re looking for a reliable supplier of high-precision lithography lenses, we are ready to support your project from concept to final integration. Whether for R&D or production-scale deployment, we deliver trusted precision optics — on time and to spec.
Contact us today for a customized consultation or technical quote.
